Keithley 595
Quasistatic CV Meter

Download Product Datasheet

Product Overview

The Keithley 595 Quasistatic C-V Meter measures quasistatic capacitance versus voltage (C-V) characteristics of Metal Insulator Semiconductor (MIS) semiconductor devices. The C-V measurement technique used by the Keithley 595 model provides diagnostics and correction for common sources of errors to increase confidence in test results.

The current function serves as a sensitive picoammeter, directly measuring DC currents to 1fA. The built-in ± 20V voltage source with DC, stair-case, and squarewave waveforms permits both current and quasistatic capacitance measurements to be made either at a single device bias or as a function of voltage. This measurement flexibility makes the Model 595 appropriate for characterization of many semiconductor materials and components.

Quasistatic C-V measurements with the Keithley 595 are made using the “feedback charge” technique. Use of this technique makes it easy to measure quasistatic C-V characteristics of devices that would be unsuitable for testing with the traditional ramp method and static or Q-V methods.

Features and Specifications of the Keithley 595 Quasistatic C-V Meter include: 

• Measures quasistatic capacitance (10 fF-20 nF) and DC current (1 fA-200 micro Amps)
• Correction of capacitance readings for background leakage currents
• Rapid assurance of device equilibrium o Superior signal-to-noise performance, even with the slow voltage sweeps required by today's state-of-the-art devices